Light emitting module

ABSTRACT

According to one embodiment, a light emitting module includes a mounting substrate, a plurality of light emitting chips, a transparent layer, and a phosphor layer. The transparent layer is provided between the plurality of light emitting chips on the mounting face and on the light emitting chip. The transparent layer has a first transparent body and a scattering agent dispersed at least in the first transparent body between the plurality of light emitting chips. The scattering agent has a different refraction index from a refraction index of the first transparent body. The phosphor layer is provided on the transparent layer. The light emitting chip includes a semiconductor layer, a p-side electrode, an n-side electrode, a p-side external terminal, and an n-side external terminal.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/597,055, filed on Aug. 28, 2012, which is based upon and claims thebenefit of priority from Japanese Patent Application No. 2012-103030,filed on Apr. 27, 2012; the entire contents of each of which areincorporated herein by reference.

FIELD

Embodiments described herein relate generally to a light emittingmodule.

BACKGROUND

In a light emitting module in which a plurality of light emittingelements of flip chip configuration are mounted on a mounting substrate,and a plurality of light emitting elements are covered by a phosphorlayer, if the phosphor layer is insufficiently filled in a space betweena plurality of light emitting elements, an irregular color may becaused.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are schematic cross-sectional views of a light emittingmodule of an embodiment;

FIGS. 2A to 2C are schematic plan views of layouts of a plurality oflight emitting chips of the light emitting module of the embodiment;

FIGS. 3A and 3B are schematic cross-sectional views of the lightemitting chip of the embodiment;

FIGS. 4A to 14B are schematic views showing a method for manufacturingthe light emitting module of the embodiment; and

FIGS. 15A and 15B are schematic cross-sectional views of a lightemitting chip of another embodiment.

DETAILED DESCRIPTION

According to one embodiment, a light emitting module includes a mountingsubstrate, a plurality of light emitting chips, a transparent layer, anda phosphor layer. The mounting substrate has a mounting face, and a padprovided on the mounting face. The plurality of light emitting chips ismounted on the mounting face so as to be spaced from each other. Thetransparent layer is provided between the plurality of light emittingchips on the mounting face and on the light emitting chip. Thetransparent layer does not include a phosphor. The transparent layer hasa first transparent body and a scattering agent dispersed at least inthe first transparent body between the plurality of light emittingchips. The scattering agent has a different refraction index from arefraction index of the first transparent body. The phosphor layer isprovided on the transparent layer. The phosphor layer has a secondtransparent body and a phosphor dispersed into the second transparentbody. The light emitting chip includes a semiconductor layer, a p-sideelectrode, an n-side electrode, a p-side external terminal, and ann-side external terminal. The semiconductor layer has a first face, asecond face opposite to the first face, and a light emitting layer. Thep-side electrode is provided on the second face in a region includingthe light emitting layer. The n-side electrode is provided on the secondface in a region not including the light emitting layer. The p-sideexternal terminal is provided between the p-side electrode and the pad,and is electrically connected to the p-side electrode and the pad. Then-side external terminal is provided between the n-side electrode andthe pad, and is electrically connected to the n-side electrode and thepad.

A description will be given below of an embodiment with reference to theaccompanying drawings. In this case, in each of the drawings, the samereference numerals are denoted to the same elements.

FIG. 1A is a schematic cross sectional view of a light emitting module100 of the embodiment.

The light emitting module 100 of the embodiment is provided with amounting substrate 200, a plurality of semiconductor light emittingchips (which may be, hereinafter, referred simply to as a light emittingchip or a chip) 1 which are mounted on the mounting substrate 200, atransparent layer 40, and a phosphor layer 30.

The mounting substrate 200 has a substrate, for example, having a resinsubstrate or a ceramic substrate as a base, a pad 202 which is providedin a mounting face 201 serving as one face of the substrate, and ainterconnection pattern (not illustrated) which is provided on themounting face 201 and is connected to the pad 202.

Alternatively, a metal plate which is excellent in a heat radiatingproperty may be used as the base substrate of the mounting substrate200. In this case, an insulating film is provided on the metal plate,and the pad 202 and the interconnection pattern are provided on theinsulating film.

An outer shape of the light emitting chip 1 is formed, for example, as arectangular parallelepiped shape. The light emitting chip 1 has a p-sideexternal terminal 23 a and an n-side external terminal 24 a which areexposed on the same face, as mentioned later with reference to FIG. 3A.A face (a first face 15 a) in an opposite side to the face in which thep-side external terminal 23 a and the n-side external terminal 24 a areexposed serves as a main pickup face of a light.

The light emitting chip 1 is mounted on the mounting face 201 in such amanner that the face to which the p-side external terminal 23 a and then-side external terminal 24 a are exposed, is directed to the mountingface 201 of the mounting substrate 200, and the first face (the lightpickup face) 15 a is directed to an upward side of the mounting face201.

The p-side external terminal 23 a and the n-side external terminal 24 aare bonded to the pad 202 via a bonding agent such as a solder 203 orthe like. A light emitting layer 13 mentioned later of the lightemitting chip 1 is electrically connected to a interconnection patternof the mounting substrate 200 via the pad 202, the solder 203, thep-side external terminal 23 a and the n-side external terminal 24 a.

A plurality of light emitting chips 1 are mounted on the mounting face201 so as to be spaced from each other. Further, the transparent layer40 is provided between a plurality of light emitting chips 1 on themounting face 201 and on the light emitting chip 1.

The transparent layer 40 has a first transparent body 41, and aplurality of granular scattering agents 42 which are scattered into thefirst transparent body 41. The transparent layer 40 does not include aphosphor.

The first transparent body 41 has a transparency with respect to aluminescent light of the light emitting chip 1 (a luminescent light ofthe light emitting layer 13), and is a transparent resin, for example, asilicone resin, an epoxy resin or the like.

The scattering agent 42 has a refraction index which is different fromthe first transparent body 41, and is a fine particle, for example, asilicon oxide, a titanium oxide or the like. An outgoing light from thelight emitting chip 1 is scattered by the scattering agent 42 in thetransparent layer 40 as mentioned below.

A top face of the transparent layer 40 is a flat face, and the phosphorlayer 30 is provided on the top face. The phosphor layer 30 has a secondtransparent body 31, and a plurality of granular fluorescent bodies 32which are scattered into the second transparent body 31.

The second transparent body 31 has a transparency with respect to theluminescent light of the light emitting chip 1, and is configured, forexample, by a silicone resin, an acrylic resin, a phenyl resin or thelike.

The phosphor 32 absorbs the luminescent light (an excited light) so asto emit a wavelength converting light. Accordingly, the light emittingmodule 100 can emit a mixed light of the luminescent light of the lightemitting chip 1 and the wavelength converting light of the phosphor 32.

For example, if the phosphor 32 is a yellow phosphor which emits ayellow light, a white color or a lamp color can be obtained as a mixedcolor of a blue color of the light emitting layer 13 serving as a GaNgroup material, and a yellow light serving as the wavelength convertinglight in the phosphor 32. In this case, the phosphor layer 30 may beconfigured such as to include plural kinds of phosphors (for example, ared phosphor emitting a red color, and a green phosphor emitting a greenlight).

The transparent layer 40 which does not include the phosphor is filledbetween a plurality of luminous chips 1, and the phosphor layer 30 isnot provided. The transparent layer 40 comes into contact with a sideface and a top face of the light emitting chip 1, and covers the sideface and the top face of the light emitting chip 1.

Next, a description will be given of the light emitting chip 1.

FIG. 3A is a schematic cross sectional view of a light emitting chip 1 acorresponding to the light emitting chip 1 in FIG. 1A.

As the light emitting chip 1 shown in FIGS. 1A and 1B, for example,there can be used any one of the light emitting chip 1 a shown in FIG.3A, a light emitting chip 1 b shown in FIG. 3B mentioned later, a lightemitting chip 1 c shown in FIG. 15A, and a light emitting chip shown inFIG. 15B.

The light emitting chip 1 a shown in FIG. 3A has a semiconductor layer15 which includes the light emitting layer 13. Further, thesemiconductor layer 15 has a first face 15 a, and a second face in anopposite side thereto. An electrode and a interconnection portion areprovided in the second face side, and the light is emitted mainly fromthe first face 15 a in which the electrode and the interconnectionportion are not provided, to an outer portion of the light emitting chip1 a.

The semiconductor layer 15 has a first semiconductor layer 11 and asecond semiconductor layer 12. The first semiconductor layer 11 and thesecond semiconductor layer 12 include, for example, a gallium nitride.The first semiconductor layer 11 includes, for example, a foundationbuffer layer, an n-type GaN layer and the like. The second semiconductorlayer 12 includes a p-type GaN layer, the light emitting layer (anactive layer) 13 and the like. The light emitting layer 13 can employ amaterial which emits a blue, violet, lavender or ultraviolet light orthe like.

The second face of the semiconductor layer 15 is processed as a concaveand convex shape, and the convex portion includes the light emittinglayer 13. A p-side electrode 16 is provided on a surface of the secondsemiconductor layer 12 serving as a surface of the convex portion. Inother words, the p-side electrode 16 is provided in the second face in aregion having the light emitting layer 13.

A region which does not include the light emitting layer 13 is providedin a sideward of the convex portion in the second face of thesemiconductor layer 15, and an n-side electrode 17 is provided on thesurface of the first semiconductor layer 11 in the region. In otherwords, the n-side electrode 17 is provided on the second face in theregion which does not include the light emitting layer 13.

As shown in FIG. 6B, in the second face of the semiconductor layer 15,an area of the second semiconductor layer 12 which includes the lightemitting layer 13 is wider than an area of the first semiconductor layer11 which does not include the light emitting layer 13.

Further, as shown in FIG. 7B, in the semiconductor layer 15, an area inthe p-side electrode 16 which is provided in the region including thelight emitting layer 13 is wider than that in the n-side electrode 17which is provided in the region which does not include the lightemitting layer 13. Accordingly, the wide luminescent region can beobtained. In this case, a layout of the p-side electrode 16 and then-side electrode 17 shown in FIG. 7B is only an example, and the layoutis not limited to this.

A first insulating film (hereinafter, referred simply to as aninsulating film) 18 is provided in a second face side of thesemiconductor layer 15. The insulating film 18 covers the semiconductorlayer 15, the p-side electrode 16 and the n-side electrode 17. Further,the insulating film 18 covers the side faces of the light emitting layer13 and the second semiconductor layer 12 so as to protect.

In this case, a different insulating film (for example, a silicon oxidefilm) may be provided between the insulating film 18 and thesemiconductor layer 15. The insulating layer 18 is made of a resin, forexample, a polyimide or the like which is excellent in a patterningproperty of a fine opening. Alternatively, an inorganic film such as asilicon oxide film, a silicon nitride film or the like may be employedas the insulating film 18.

The insulating film 18 is not provided on the first face 15 a of thesemiconductor layer 15. The insulating film 18 covers a side face 15 cwhich runs from the first face 15 a in the semiconductor layer 15 so asto protect.

A p-side interconnection layer 21 and an n-side interconnection layer 22are provided on a face in an opposite side to the second face of thesemiconductor layer 15, in the insulating film 18 so as to be spacedfrom each other.

The p-side interconnection layer 21 is provided within a plurality ofthe first openings 18 a which run into the p-side electrode 16 so as tobe formed in the insulating film 18, and is electrically connected tothe p-side electrode 16. The n-side interconnection layer 22 is providedwithin a second opening 18 b which runs into the n-side electrode 17 soas to be formed in the insulating film 18, and is electrically connectedto the n-side electrode 17.

A p-side metal pillar 23 is provided on a face in an opposite side tothe p-side electrode 16 in the p-side interconnection layer 21. Themetal film 19 which is used as the p-side interconnection layer 21, thep-side metal pillar 23 and a seed layer mentioned later configures thep-side interconnection portion in the embodiment.

An n-side metal pillar 24 is provided on a face in an opposite side tothe n-side electrode 17 in the n-side interconnection layer 22. Themetal film 19 which is used as the n-side interconnection layer 22, then-side metal pillar 24 and a seed layer mentioned later configures then-side interconnection portion in the embodiment.

For example, a resin layer 25 is stacked as the second insulating filmon the insulating film 18. The resin layer 25 covers a periphery of thep-side interconnection portion and a periphery of the n-sideinterconnection portion. Further, the resin layer 25 is filled betweenthe p-side metal pillar 23 and the n-side metal pillar 24.

A side face of the p-side metal pillar 23 and a side face of the n-sidemetal pillar 24 are covered by the resin layer 25. A face in an oppositeside to the p-side interconnection layer 21 in the p-side metal pillar23 is exposed from the resin layer 25, and serves as a p-side externalterminal 23 a. A face in an opposite side to the n-side interconnectionlayer 22 in the n-side metal pillar 24 is exposed from the resin layer25, and serves as an n-side external terminal 24 a.

A distance between the p-side external terminal 23 a and the n-sideexternal terminal 24 a which are exposed on the same face (the lowerface in FIG. 3A) in the resin layer 25 is larger than a distance betweenthe p-side interconnection layer 21 and the n-side interconnection layer22 on the insulating film 18. The p-side external terminal 23 a and then-side external terminal 24 a are away so as to be spaced at a distanceat which they are not short circuited with each other by a soldering orthe like at a time of being mounted to the mounting substrate.

The p-side interconnection layer 21 can be moved close to the n-sideinterconnection layer 22 to a critical limit on a process, and an areaof the p-side interconnection layer 21 can be widened. As a result, itis possible to achieve an enlargement of a contact area between thep-side interconnection layer 21 and the p-side electrode 16, and it ispossible to improve a current distribution and a heat radiatingperformance.

An area at which the p-side interconnection layer 21 comes into contactwith the p-side electrode 16 through a plurality of first openings 18 ais larger than an area at which the n-side interconnection layer 22comes into contact with the n-side electrode 17 through the secondopening 18 b. Accordingly, a current distribution to the light emittinglayer 13 is improved, and a heat radiating performance of the heat ofthe light emitting layer 13 can be improved.

An area of the n-side interconnection layer 22 which expands on theinsulating film 18 is larger than an area at which the n-sideinterconnection layer 22 comes into contact with the n-side electrode17.

In accordance with the embodiment, it is possible to obtain a high lightoutput by the light emitting layer 13 which is formed over a widerregion than the n-side electrode 17. In this case, the n-side electrode17 which is provided in the narrower region than the region includingthe light emitting layer 13 is drawn as the n-side interconnection layer22 having a wider area to the mounting face side.

The first semiconductor layer 11 is electrically connected to the n-sidemetal pillar 24 having the n-side external terminal 24 a via the n-sideelectrode 17, the metal film 19 and the n-side interconnection layer 22.The second semiconductor layer 12 including the light emitting layer 13is electrically connected to the p-side metal pillar 23 having thep-side external terminal 23 a via the p-side electrode 16, the metalfilm 19 and the p-side interconnection layer 21.

The p-side metal pillar 23 is thicker than the p-side interconnectionlayer 21, and the n-side metal pillar 24 is thicker than the n-sideinterconnection layer 22. The respective thicknesses of the p-side metalpillar 23, the n-side metal pillar 24 and the resin layer 25 are largerthan the semiconductor layer 15. In this case, “thickness” hereexpresses a thickness in a vertical direction in FIG. 3A.

Further, the respective thicknesses of the p-side metal pillar 23 andthe n-side metal pillar 24 are larger than a thickness of a stacked bodywhich includes the semiconductor layer 15, the p-side electrode 16, then-side electrode 17 and the insulating film 18. In this case, an aspectration (a ratio of the thickness with respect to the plane size) of eachof the metal pillars 23 and 24 is not limited to be not less than 1, butthe ratio may be smaller than 1. In other words, the metal pillars 23and 24 may be smaller its thickness than the plane size.

In accordance with the embodiment, even if a substrate 10 mentionedbelow which is used for forming the semiconductor layer 15 is removed,it is possible to stably support the semiconductor layer 15 by thep-side metal pillar 23, the n-side metal pillar 24 and the resin layer25, and it is possible to enhance a mechanical strength of the lightemitting chip 1 a.

As the material of the p-side interconnection layer 21, the n-sideinterconnection layer 22, the p-side metal pillar 23 and the n-sidemetal pillar 24, a copper, a gold, a nickel, a silver and the like canbe employed. Among them, if the copper is used, it is possible to obtaina good heat conductivity, a high metal migration resistance and anexcellent adhesion with an insulating material.

The resin layer 25 reinforces the p-side metal pillar 23 and the n-sidemetal pillar 24. As the resin layer 25, a resin in which a coefficientof thermal expansion is equal to or similar to the mounting substrate isdesired. As the resin layer as mentioned above, there can be listed up,for example, an epoxy resin, a silicone resin, a fluorine resin and thelike.

Further, in a state in which the light emitting chip 1 a is mounted to amounting substrate 200 shown in FIG. 1A via the p-side external terminal23 a and the n-side external terminal 24 a, it is possible to reduce astress applied to the semiconductor layer 15 via the solder 203 by beingabsorbed by the p-side metal pillar 23 and the n-side metal pillar 24.

The p-side interconnection portion including the p-side interconnectionlayer 21 and the p-side metal pillar 23 is connected to the p-sideelectrode 16 via a plurality of vias 21 a which are provided within aplurality of first openings 18 a and segmentized with each other.Accordingly, a high stress reducing effect by the p-side interconnectionportion can be obtained.

Alternatively, the p-side interconnection layer 21 may be connected tothe p-side electrode 16 via a post 21 c which has a larger plane sizethan the via 21 a, and is provided within one large first opening 18 a,such as the light emitting chip 1 b shown in FIG. 3B. In this case, itis possible to improve a heat radiating performance of the lightemitting layer 13 through the p-side electrode 16, the p-sideinterconnection layer 21 and the p-side metal pillar 23, each of whichis made of a metal.

As mentioned later, the substrate 10 which is used at a time of formingthe semiconductor layer 15 is removed from the first face 15 a.Accordingly, it is possible to form the semiconductor luminescentapparatus 1 in a low back.

Fine concavities and convexities are formed on the first face 15 a ofthe semiconductor layer 15. The concavities and convexities are formed,for example, by carrying out a wet etching (a frost process) using analkali solution with respect to the first face 15 a. It is possible topick up the light entering into the first face 15 a at various angles toan outer side of the first face 15 a without reflecting every light, byproviding the concavities and convexities on the first face 15 a whichis a main pickup face of the luminescent light of the light emittinglayer 13.

Further, as shown in FIG. 3B, a transparent layer 61 having atransparency with respect to the luminescent light of the light emittinglayer 13 may be provided on the first face 15 a. The transparent layer61 is configured, for example, by a silicone resin, an epoxy resin orthe like which is excellent in a light transmittance in a visible lightregion.

Next, a description will be given of a manufacturing method of the lightemitting chip 1 a with reference to FIG. 4A to FIG. 14B. FIG. 4A to FIG.14B express a partial region in a wafer state.

FIG. 4A shows a stacked body in which the first semiconductor layer 11and the second semiconductor layer 12 are formed on a main face of thesubstrate 10 (a lower face in FIG. 4A). FIG. 4B corresponds to a bottomelevational view in FIG. 4A.

The first semiconductor layer 11 is formed on a main face of thesubstrate 10, and a second semiconductor layer 12 including the lightemitting layer 13 is formed thereon. The first semiconductor layer 11and the second semiconductor layer 12 which include a gallium nitridecan be crystalline grown, for example, on a sapphire substrate inaccordance with a metal organic chemical vapor deposition (MOCVD)method. Alternatively, a silicon substrate may be used as the substrate10.

A face which comes into contact with the substrate 10 in the firstsemiconductor layer 11 is a first face 15 a of the semiconductor layer15, and a surface of the second semiconductor layer 12 is a second face15 b of the semiconductor layer 15.

Next, for example, in accordance with a reactive ion etching (RIE)method using a resist which is not illustrated, as shown in FIG. 5A andFIG. 5B corresponding to a bottom elevational view thereof, a groove 80reaching the substrate 10 through the semiconductor layer 15 is formed.The groove 80 is formed, for example, as a grating shape on thesubstrate 10 in a wafer state, and the semiconductor layer 15 isseparated into a plurality of chips on the substrate 10.

In this case, a process of separating the semiconductor layer 15 into aplurality of sections may be carried out after selectively removing thesecond semiconductor layer 12 mentioned later or after forming theelectrode.

Next, for example, in accordance with the RIE method using the resistwhich is not illustrated, as shown in FIG. 6A and FIG. 6B correspondingto a bottom elevational view thereof, a part of the second semiconductorlayer 12 is removed and a part of the first semiconductor layer 11 isexposed. A region to which the first semiconductor layer 11 is exposeddoes not include the light emitting layer 13.

Next, as shown in FIG. 7A and FIG. 7B corresponding to a bottomelevational view thereof, the p-side electrode 16 and the n-sideelectrode 17 are formed on the second face of the semiconductor layer15. The p-side electrode 16 is formed on the surface of the secondsemiconductor layer 12. The n-side electrode 17 is formed on the exposedface of the first semiconductor layer 11.

The p-side electrode 16 and the n-side electrode 17 are formed, forexample, in accordance with a sputter method, a vapor deposition methodor the like. Either of the p-side electrode 16 or the n-side electrode17 may be an electrode to be formed first, and may be simultaneouslyformed by the same material.

The p-side electrode 16 includes, for example, a silver, a silver alloy,an aluminum, an aluminum alloy or the like which has a reflectingproperty with respect to the luminescent light of the light emittinglayer 13. Further, in order to prevent a sulfuration and an oxidation ofthe p-side electrode 16, a configuration including a metal protectionfilm (a barrier metal) may be employed.

Further, for example, a silicon nitride film or a silicon oxide film maybe formed as a passivation film on an end face (a side face) of thelight emitting layer 13 or between the p-side electrode 16 and then-side electrode 17, in accordance with a chemical vapor deposition(CVD) method. Further, an activation anneal or the like for obtaining anohmic contact between each of the electrodes and the semiconductor layeror the like is executed as appropriate.

Next, a first opening 18 a and a second opening 18 b are selectivelyformed in the insulating film 18 by covering all the portion which isexposed onto the main face of the substrate 10 by the insulating film 18shown in FIG. 8A, and thereafter patterning the insulating film 18 inaccordance with a wet etching or the like. A plurality of first openings18 a are formed, and each of the first openings 18 a reaches the p-sideelectrode 16. The second opening 18 b reaches the n-side electrode 17.

As the insulating film 18, for example, an organic material such as aphotosensitive polyimide, a benzocyclobutene or the like can beemployed. In this case, an exposure and a development can be applieddirectly to the insulating film 18 without using any resist.

Alternatively, an inorganic film such as the silicon nitride film, thesilicon oxide film or the like can be used as the insulating film 18. Inthe case that the insulating film 18 is the inorganic film, the firstopening 18 a and the second opening 18 b are formed in accordance withan etching after patterning the resist which is formed on the insulatingfilm 18.

Next, a metal film 19 is formed, as shown in FIG. 8B, on a surface ofthe insulating film 18, an inner wall (a side wall and a bottom portion)of the first opening 18 a, and an inner wall (a side wall and a bottomportion) of the second opening 18 b. The metal film 19 is used as a seedmetal of a plating mentioned later.

The metal film 19 is formed, for example, in accordance with asputtering method. The metal film 19 includes, for example, a stackedfilm of a titanium (Ti) and a copper (Cu) which are stacked in thisorder from the insulating film 18 side. Alternatively, an aluminum filmmay be used in place of the titanium film.

Next, as shown in FIG. 8C, a resist 91 is selectively formed on themetal film 19, and a Cu electrolyte plating using the metal film 19 as acurrent route is carried out.

Accordingly, as shown in FIG. 9A and FIG. 9B corresponding to a bottomelevational view thereof, the p-side interconnection layer 21 and then-side interconnection layer 22 are selectively formed on the metal film19. The p-side interconnection layer 21 and the n-side interconnectionlayer 22 are simultaneously formed in accordance with the platingmethod, and are configured, for example, by a copper material.

The p-side interconnection layer 21 is formed within the first opening18 a, and is electrically connected to the p-side electrode 16 via themetal film 19. The n-side interconnection layer 22 is formed within thesecond opening 18 b, and is electrically connected to the n-sideelectrode 17 via the metal film 19.

The resist 91 which is used for plating the p-side interconnection layer21 and the n-side interconnection layer 22 is removed by using a solventor an oxide plasma.

Next, as shown in FIG. 10A and FIG. 10B corresponding to a bottomelevational view thereof, a resist 92 for forming a metal pillar isformed. The resist 92 is thicker than the resist 91 mentioned above. Inthis case, the resist 91 may be left without being removed in thepreceding process, and the resist 92 may be formed in an overlappingmanner on the resist 91. A first opening 92 a and a second opening 92 bare formed in the resist 92.

Further, a Cu electrolyte plating using the metal film 19 as a currentroute is carried out by using the resist 92 as a mask. Accordingly, asshown in FIG. 11A and FIG. 11B corresponding to a bottom elevationalview thereof, the p-side metal pillar 23 and the n-side metal pillar 24are formed.

The p-side metal pillar 23 is formed on the surface of the p-sideinterconnection layer 21 within the first opening 92 a which is formedin the resist 92. The n-side metal pillar 24 is formed on the surface ofthe n-side interconnection layer 22 within the second opening 92 b whichis formed in the resist 92. The p-side metal pillar 23 and the n-sidemetal pillar 24 are simultaneously formed in accordance with the platingmethod and are configured, for example, by the copper material.

The resist 92 is removed, for example, by using a solvent or an oxideplasma, as shown in FIG. 12A. Thereafter, an exposed portion of themetal film 19 is removed in accordance with a wet etching by using themetal pillar 23, the n-side metal pillar 24, the p-side interconnectionlayer 21 and the n-side interconnection layer 22 as the mask.Accordingly, as shown in FIG. 12B, the electric connection between thep-side interconnection layer 21 and the n-side interconnection layer 22via the metal film 19 is segmented.

Next, as shown in FIG. 13A, the resin layer 25 is stacked with respectto the insulating film 18. The resin layer 25 covers the p-sideinterconnection layer 21, the n-side interconnection layer 22, thep-side metal pillar 23 and the n-side metal pillar 24.

The resin layer 25 has an insulating property. Further, the resin layer25 may be provided with a light shielding property against theluminescent light of the light emitting layer 13, for example, byincluding a carbon black.

Next, as shown in FIG. 13B, the substrate 10 is removed. In the casethat the substrate 10 is the sapphire substrate, the substrate 10 can beremoved, for example, in accordance with a laser liftoff method.Specifically, a laser light is irradiated from the back face side of thesubstrate 10 toward the first semiconductor layer 11. The laser lighthas a transparency with respect to the substrate 10, and has awavelength which comes to an absorption region with respect to the firstsemiconductor layer 11.

If the laser light reaches an interface between the substrate 10 and thefirst semiconductor layer 11, the first semiconductor layer 11 in thevicinity of the interface absorbs an energy of the laser light so as tobe decomposed. The first semiconductor layer 11 is decomposed into thegallium (Ga) and the nitrogen gas. In accordance with the decomposingreaction, a micro gap is formed between the substrate 10 and the firstsemiconductor layer 11, and the substrate 10 and the first semiconductorlayer 11 are separated.

An irradiation of the laser light is carried out over a whole wafer aplurality of times per a set region, thereby removing the substrate 10.

In the case that the substrate 10 is the silicon substrate, thesubstrate 10 can be removed in accordance with an etching.

Since the stacked body mentioned above which is formed on the main faceof the substrate 10 is reinforced by the p-side metal pillar 23, then-side metal pillar 24 and the resin layer 25 which are thicker than thesemiconductor layer 15, it is possible to keep a wafer state even if thesubstrate 10 runs short.

Further, the resin layer 25, and the metal which configures the p-sidemetal pillar 23 and the n-side metal pillar 24 are flexible materials incomparison with the semiconductor layer 15. The semiconductor layer 15is supported by the flexible support body mentioned above. Therefore,even if a great internal stress which is generated at a time ofepitaxial growing the semiconductor layer 15 on the substrate 10 isreleased at a stroke at a time of peeling the substrate 10, it ispossible to avoid the semiconductor layer 15 from being broken.

The first face 15 a of the semiconductor layer 15 from which thesubstrate 10 is removed is washed. For example, the gallium (Ga)attached to the first face 15 a is removed by a dilute hydrofluoric acidor the like.

Thereafter, for example, the first face 15 a is wet etched by apotassium hydroxide (KOH) water solution, a tetramethyl ammoniumhydroxide (TMAH) or the like. Accordingly, the concavities andconvexities are formed on the first face 15 a corresponding to adifference of an etching speed which depends on a crystal facedirection. Alternatively, the concavities and convexities may be formedon the first face 15 a by carrying out an etching after patterning bythe resist. Since the concavities and convexities are formed on thefirst face 15 a, it is possible to improve a light pickup efficiency.

Next, the surface (the lower face in FIG. 13B) of the resin layer 25 isground, and the p-side external terminal 23 a and the n-side externalterminal 24 a are exposed from the resin layer 25.

Thereafter, as shown in FIG. 14A and FIG. 14B corresponding to a bottomelevational view thereof, the insulating film 18 and the resin layer 25are cut at a position of the groove 80 mentioned above into a pluralityof light emitting chips 1 a. For example, it is cut by using a dicingblade. Alternatively, it may be cut in accordance with a laserirradiation.

At a time of dicing, the substrate 10 has been already removed. Further,since the semiconductor layer 15 does not exist in the groove 80, it ispossible to avoid a damage which the semiconductor layer 15 is exposedat a time of dicing. Further, it is possible to obtain a configurationin which the end portion (the side face) of the semiconductor layer 15is covered by the insulating film 18 so as to be protected, without anyadditional process after segmenting.

In this case, the segmented light emitting chip 1 a may be a single chipconfiguration including one semiconductor layer 15, or a multi chipconfiguration including a plurality of semiconductor layers 15.

Since each of the processes mentioned above before being diced iscarried out in a lump in a wafer state, it is not necessary to carry outa interconnection and a packaging per the segmented individual device,and it is possible to widely reduce a manufacturing cost. In otherwords, the interconnection and the packaging are finished already in thesegmented state. Accordingly, it is possible to enhance a productivity.As a result, it is easy to reduce a cost.

As shown in FIG. 1A, the segmented individual light emitting chip 1 ismounted on the mounting substrate 200. As mentioned above, the p-sideexternal terminal 23 a and the n-side external terminal 24 a are bondedto a pad 202, for example, by a solder 203.

After mounting the light emitting chip 1, the transparent layer 40 isformed on the mounting face 201. In the case that the first transparentbody 41 of the transparent layer 40 is configured by a resin material,the transparent layer 40 can be formed by supplying a liquid resin intowhich the scattering agent 41 is dispersed onto the mounting face 201,and thereafter hardening.

The top face of the transparent layer 40 is formed flat, and thephosphor layer 30 is formed thereon. In the case that the secondtransparent body 31 of the phosphor layer 30 is configured by the resinmaterial, a liquid resin into which the phosphor 32 is dispersed issupplied onto the transparent layer 40, for example, in accordance witha method such as a printing, a potting, a molding, a compression moldingor the like, and is thereafter thermally hardened.

Alternatively, the film-shaped phosphor layer 30 may be attached to thetop face of the transparent layer 40. Since the top face of thetransparent layer 40 is flat, the phosphor layer 30 can be easilyattached closely to the transparent layer 40 while holding the gapbetween the transparent layer 40 and the phosphor layer 30.

For example, in the case of forming the liquid resin into which thephosphor is dispersed, in accordance with the printing method, aviscosity of the phosphor including liquid resin is between 5000 and10000 (cP), which is comparatively high, and there is a risk that anunfilled portion (a void) of the phosphor layer is formed between thechips, depending on the magnitude of the gap between the chips. The void(a gap) generated between the chips may cause a peeling, a foam, and anirregular color of the phosphor layer.

On the contrary, in accordance with the embodiment, the transparentlayer 40 which does not include the phosphor is filled in place of thephosphor layer, between the light emitting chips 1. The transparentlayer 40 which does not include the phosphor is lower in a viscositythan the phosphor layer 30. Accordingly, in order to achieve a highpower density by the high density mounting, the transparent layer 40 maybe filled between the chip gaps without generating any void, even in thecase that the gap between the light emitting chips 1 is narrow.

Further, the transparent layer 40 includes the scattering agent 42. Theluminescent light (the excited light) of the light emitting chip 1 isscattered by the scattering agent 42 in the transparent layer 40, and itis possible to widen a light distribution angle of the excited light.

In the light emitting chip 1 a shown in FIG. 3A, the insulating film 18provided in the side face of the semiconductor layer 15 has atransparency with respect to the luminescent light of the light emittinglayer 13, and the light is emitted from the side face of thesemiconductor layer 15.

Since the scattering agent 42 is dispersed into the transparent layer 40between a plurality of light emitting chips 1, the light emitted fromthe side face of the light emitting chip 1 is scattered by thescattering agent 42. Accordingly, in the light emitting module 100, itis possible to increase the excited light to the above (the phosphorlayer 30 side) of the portion in which the light emitting chip 1 is notmounted.

In other words, it is possible to uniformize the distribution in theface direction of the intensity of the excited light which enters intothe phosphor layer 30, by the transparent layer 40 which is mountedbetween the light emitting chips 1 and on the light emitting chip 1 andincludes the scattering agent 42. Accordingly, it is possible to makethe configuration body configured by a plurality of light emitting chips1 and the transparent layer 40 covering them emit uniformly in the facedirection as if it is a single chip. Since the uniform light enters intothe phosphor layer 30, it is possible to suppress an irregular color inthe face direction which is in parallel to the mounting face 201.

Further, since the top face of the transparent layer 40 is flat, it ispossible to make the thickness of the phosphor layer 30 provided on theflat face uniform. Accordingly, it is possible to suppress an irregularcolor caused by a thickness dispersion of the phosphor layer 30.

A size (an average grain diameter) of the scattering agent 42 is smallerthan the emission wavelength of the light emitting layer 13. For thisreason, the excited light Rayleigh scatters in the transparent layer 40.In the Rayleigh scattering, since a scattering intensity is in inverseproportion to a biquadrate of the wavelength, the light becomes a lightscattering having a wavelength dependency in which the scatteringintensity becomes stronger toward the shorter wavelength. Therefore, itis easy to scatter the blue light which is emitted from the lightemitting layer 13 which is the GaN material.

The transparent layer is not limited to a single layer configuration,but may be a stacked configuration having a plurality of layers such asa light emitting module 100′ shown in FIG. 1B, or a light emittingmodule 100″ shown in FIG. 1C.

In the light emitting module 100′ shown in FIG. 1B, another transparentlayer 43 is provided on the transparent layer 40.

The transparent layer 40 is the same as the transparent layer 40 in thelight emitting module 100 of the embodiment mentioned above, has a firsttransparent body 41 and a scattering agent 42 which is dispersed intothe first transparent body 41, and is filled between a plurality oflight emitting chips 1.

The transparent layer 40 is not provided on the light emitting chip 1,but a transparent layer 43 which does not include the scattering agentis provided. The transparent layer 43 has a transparency with respect tothe luminescent light of the light emitting chip 1 (the luminescentlight of the light emitting layer 13), and is a transparent resin, forexample, a silicone resin, an epoxy resin or the like. The transparentlayer 43 mainly performs an adhesion to the phosphor layer 30.

The top face of the transparent layer 40 and the top face of the lightemitting chip 1 configure a flat face which has the same height from themounting face 201. Further, the top face of the transparent layer 43which is provided on the top face of the transparent layer 40 and on thetop face of the light emitting chip 1 is flat. Accordingly, it ispossible to form the phosphor layer 30 on the flat face of thetransparent layer 43, and it is easy to make the film thickness of thephosphor layer 30 uniform.

Even in the light emitting module 100′ shown in FIG. 1B, since thescattering agent 42 is dispersed into the transparent layer 40 between aplurality of light emitting chips 1, the light emitted from the sideface of the light emitting chip 1 is scattered by the scattering agent42. Accordingly, in the light emitting module 100′, it is possible toincrease the excited light to above the portion (the side of thephosphor layer 30) in which the light emitting chip 1 is not mounted. Asa result, it is possible to achieve a uniformization of the distributionin the face direction of the intensity of the excited light which entersinto the phosphor layer 30, and it is possible to suppress the irregularcolor.

Further, such as the light emitting module 100″ shown in FIG. 1C, thetransparent layer 43 which does not include the scattering agent may beprovided on the transparent layer 40, after providing the transparentlayer 40 including the scattering agent 42 on the light emitting chip 1.In this case, it is possible to form the phosphor layer 30 on the flatface of the transparent material layer 43.

FIG. 15A is a schematic cross sectional view of a light emitting chip 1c according to the other embodiment.

The light emitting chip 1 c is provided with a p-side pad 51 whichcovers the p-side electrode 16, on the surface and the side face of thep-side electrode 16. The p-side electrode 16 includes a material whichcan form an alloy together with the gallium (Ga) included in thesemiconductor material layer 15, for example, at least one of a nickel(Ni), a gold (Au) and a rhodium (Rh). The p-side pad 51 is higher in areflectance with respect to the luminescent light of the light emittinglayer 13 than the p-side electrode 16, and includes, for example, asilver (Ag) as a main component. Further, the p-side pad 51 protects thep-side electrode 16 from an oxidation and a corrosion.

Further, an n-side pad 52 which covers the n-side electrode 17 isprovided on the surface and the side face of the n-side electrode 17.The n-side electrode 17 includes a material which can form an alloytogether with the gallium (Ga) included in the semiconductor layer 15,for example, at least one of the nickel (Ni), the gold (Au) and therhodium (Rh). The n-side pad 52 is higher in its reflectance withrespect to the luminescent light of the light emitting layer 13 than then-side electrode 17, and includes, for example, the silver (Ag) as amain component. Further, the n-side pad 52 protects the n-side electrode17 from the oxidation and the corrosion.

An insulating film 53, for example, a silicon oxide film, a siliconnitride film or the like is provided around the p-side electrode 16 andaround the n-side electrode 17 in the second face of the semiconductorlayer 15. The insulating film 53 is provided between the p-sideelectrode 16 and the n-side electrode 17, and between the p-side pad 51and the n-side pad 52.

An insulating film 54, for example, a silicon oxide film, a siliconnitride film or the like is provided on the insulating film 53, on thep-side pad 51 and on the n-side pad 52. Further, the insulating film 54is provided in the side face 15 c of the semiconductor layer 15, andcovers the side face 15 c.

The p-side interconnection layer 21 and the n-side interconnection layer22 are provided on the insulating film 54. The p-side interconnectionlayer 21 is connected to the p-side pad 51 through a first opening 54 awhich is formed in the insulating film 54. The n-side interconnectionlayer 22 is connected to the n-side pad 52 through a second opening 54 bwhich is formed in the insulating film 54.

In this configuration, the p-side interconnection layer 21 may beconnected to the p-side pad 51 via a plurality of vias 21 a as shown inthe drawing, or may be connected to the p-side pad 51 through one postwhich is larger in its plane size than the via 21 a.

A p-side metal pillar 23 which is thicker than the p-sideinterconnection layer 21 is provided on the p-side interconnection layer21. An n-side metal pillar 24 which is thicker than the n-sideinterconnection layer 22 is provided on the n-side interconnection layer22.

The resin layer 25 is stacked with respect to the insulating film 54.The resin layer 25 covers the p-side interconnection portion whichincludes the p-side interconnection layer 21 and the p-side metal pillar23, and the n-side interconnection portion which includes the n-sideinterconnection layer 22 and the n-side metal pillar 24. In this case, aface (a lower face in the drawing) in an opposite side to the p-sideinterconnection layer 21 in the p-side metal pillar 23 is exposed fromthe resin layer 25, and serves as the p-side external terminal 23 a. Inthe same manner, a face (a lower face in the drawing) in an oppositeside to the n-side interconnection layer 22 in the n-side metal pillar24 is exposed from the resin layer 25, and serves as the n-side externalterminal 24 a.

The resin layer 25 is filled in the groove 80 via the insulating film54, the groove 80 separating the semiconductor layer 15 into a pluralityof sections on the substrate 10. Accordingly, the side face 15 c of thesemiconductor layer 15 is covered by the insulating film 54corresponding to the inorganic film, and the resin layer 25 so as to beprotected.

In the same manner as the embodiment mentioned above, the p-sideinterconnection layer 21, the n-side interconnection layer 22, thep-side metal pillar 23 and the n-side metal pillar 24 can be formed inaccordance with a plating method. The metal film 19 which is used as theseed metal at a time of plating is left as the foundation of the p-sideinterconnection layer 21 and the n-side interconnection layer 22, asshown in FIG. 15B. Further, the metal film 19 is left in the side faceof the insulating film 54 which covers the side face 15 c of thesemiconductor layer 15.

Further, as shown in FIG. 15B, the first face 15 a may be provided withan inorganic film 62, for example, a silicon oxide film, a siliconnitride film, a silicon oxynitride film, a spin on glass (SOG) film orthe like.

The inorganic film 62 has a refraction index between a gallium nitridewhich is used in the semiconductor layer 15, and an air. The inorganicfilm 62 has a transparency with respect to the light which is dischargedout of the light emitting layer 13.

The inorganic film 62 is provided in a conformal manner along theconcavities and convexities of the first face 15 a, and concavities andconvexities reflected on the concavities and convexities of the firstface 15 a are formed on a surface of the inorganic film 62.

It is possible to prevent a refraction index of a medium from beinglargely changed in the pickup direction of the light through the firstface 15 a, by providing the inorganic film 62 having the refractionindex between the gallium nitride and the air on the first face 15 aincluding the gallium nitride, whereby it is possible to improve a lightpickup efficiency.

Next, a description will be given of an array on the mounting substrate200 of a plurality of light emitting chips 1.

FIGS. 2A and 2B are schematic plan views of a plurality of lightemitting chips 1 which are mounted on the mounting substrate 200 as seenfrom a side of the first face 15 a.

The light emitting chip 1 is formed as a rectangular shape which hasfour corner portions (apex portions) and four sides, in a plan view asseen from the side of the first face 15 a.

In accordance with the array shown in FIG. 2A, a portion which isopposed to the adjacent chip 1 being spaced at a shortest distance a isthe corner portion (the apex portion). Accordingly, in the chip 1, aportion which is opposed to the adjacent chip 1 being spaced at theshortest distance a is a point, and a size thereof is shorter than alength of one side of the chip 1.

Further, in accordance with the array shown in FIG. 2B, a portion whichis opposed to the adjacent chip 1 being spaced at a shortest distance bis a part of the side of the chip 1. Accordingly, in the chip 1, alength c in the plan view of the portion which is opposed to theadjacent chip 1 being spaced at the shortest distance b is shorter thanthe length of one side of the chip 1.

In accordance with the array of FIGS. 2A and 2B, not all the portions ofone side of the chip 1 is opposed at the shortest distance with respectto the adjacent chip 1. In other words, in accordance with the array inFIGS. 2A and 2B, a part of the corner portion or one side of the chip 1is opposed, in the portion in which the distance to the adjacent chip 1is the shortest. Accordingly, the outgoing light from the side face ofthe chip 1 is hard to be obstructed by the side face of the adjacentchip 1, and it becomes possible to enhance a radiation efficiency to theupper portion in which the phosphor layer 30 is provided.

FIG. 2C shows a layout of a plurality of chips 1 which are disposed inall directions (in a matrix shape) along an X-axis direction and aY-axis direction which are orthogonal on the plan view seeing the firstface 15 a. The chip array in FIGS. 2A and 2B can be obtained by rotatingeach of the chips 1 in the layout in FIG. 2C around the center of thechip 1 as a center of rotation at an angle θ and within an XY plane.

For example, the chip layout in FIG. 2A can be obtained by rotating thechip in FIG. 2C which is shown in an overlapping manner by a brokenline, around a chip center o as a center of rotation in a clockwisedirection at angle θ (for example, 45 degree). The angle θ can beoptionally set.

In the embodiment mentioned above, the p-side interconnection layer 21and the n-side interconnection layer 22 may be bonded to the pad 202 ofthe mounting substrate 200 without providing the p-side metal pillar 23and the n-side metal pillar 24.

Further, the p-side interconnection layer 21 and the p-side metal pillar23 are not limited to be the separate bodies, but the p-sideinterconnection portion may be configured by integrally forming thep-side interconnection layer 21 and the p-side metal pillar 23 in thesame process. In the same manner, the n-side interconnection layer 22and the n-side metal pillar 24 are not limited to be the separatebodies, but the n-side interconnection portion may be configured byintegrally forming the n-side interconnection layer 22 and the n-sidemetal pillar 24 in the same process.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modification as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A light emitting module, comprising: a mountingsubstrate having a mounting face, and a pad provided on the mountingface; a plurality of light emitting chips mounted on the mounting facesuch that adjacent light emitting chips in the plurality are spaced fromeach other by a first distance; a transparent layer provided between theplurality of light emitting chips, the transparent layer not including aphosphor, and having a first transparent body and a scattering agentthat is dispersed in the first transparent body, the scattering agenthaving a different refraction index from a refraction index of the firsttransparent body, the transparent layer spanning the first distancebetween adjacent light emitting chips in the plurality and directlycontacting each adjacent light emitting chip; and a phosphor layerprovided on the transparent layer, and having a second transparent bodyand a phosphor dispersed into the second transparent body, each lightemitting chip including: a semiconductor layer having a first face, asecond face opposite to the first face, and a light emitting layer; ap-side electrode provided on the semiconductor layer including the lightemitting layer; an n-side electrode provided on the semiconductor layernot including the light emitting layer; a p-side external terminalprovided between the p-side electrode and the pad, and electricallyconnected to the p-side electrode and the pad; and an n-side externalterminal provided between the n-side electrode and the pad, andelectrically connected to the n-side electrode and the pad.
 2. Themodule according to claim 1, wherein the transparent layer completelyfills any spacing between the plurality of light emitting chips, and thephosphor layer is not provided in the spacing between the plurality oflight emitting chips.
 3. The module according to claim 1, wherein a topface of the transparent layer is flat.
 4. The module according to claim1, wherein a size of the scattering agent is smaller than a emissionwavelength of the light emitting layer.
 5. The module according to claim1, wherein each light emitting chip has a rectangular shape in a planview, as seen from the first face side, and the plurality of lightemitting chips is arranged such that a facing portion of each lightemitting chip is less than a full length of any side of the lightemitting chip including the facing portion, the facing portion beingthat portion of the light emitting chip that is spaced from any adjacentlight emitting chip by the first distance.
 6. The module according toclaim 5, wherein the facing portion of each light emitting chip is acorner portion.
 7. The module according to claim 5, wherein the facingportion of each light emitting chip extends along a side of each lightemitting chip.
 8. The module according to claim 1, wherein the lightemitting chip further includes a first insulating film provided on aside of the second face, and having a first opening communicating withthe p-side electrode and a second opening communicating with the n-sideelectrode; a p-side interconnection portion provided on the firstinsulating film and electrically connected to the p-side electrodethrough the first opening, the p-side interconnection portion having thep-side external terminal; and an n-side interconnection portion providedon the first insulating film and electrically connected to the n-sideelectrode through the second opening, n-side interconnection portionhaving the n-side external terminal.
 9. The module according to claim 8,wherein the first insulating film covers a side face that extends fromthe first face of the semiconductor layer.
 10. The module according toclaim 9, wherein the first insulating film has a transparency withrespect to light emitted from the light emitting layer.
 11. The moduleaccording to claim 8, wherein the light emitting chip further includes asecond insulating film provided between the p-side interconnectionportion and the n-side interconnection portion.
 12. The module accordingto claim 11, wherein the second insulating film covers a periphery ofthe p-side interconnection portion and a periphery of the n-sideinterconnection portion.
 13. The module according to claim 8, whereinthe p-side interconnection portion includes a p-side interconnectionlayer provided inside the first opening and on the first insulatingfilm; and a p-side metal pillar provided on the p-side interconnectionlayer, being thicker than the p-side interconnection layer, and havingthe p-side external terminal, and the n-side interconnection portioninclude an n-side interconnection layer provided inside the secondopening and on the first insulating film; and an n-side metal pillarprovided on the n-side interconnection layer, being thicker than then-side interconnection layer, and having the n-side external terminal.14. The module according to claim 1, wherein the light emitting chipfurther include a second transparent layer provided on the first face.15. The module according to claim 1, wherein the transparent layer has astacked configuration of a plurality of transparent layers.
 16. Themodule according to claim 15, wherein the plurality of transparentlayers includes a transparent layer which is provided on the lightemitting chip, and does not include the scattering agent.
 17. The moduleaccording to claim 1, wherein the light emitting chip further includesan inorganic film provided on the first face, and having a transparencywith respect to light emitted from the light emitting layer.
 18. Themodule according to claim 17, wherein the inorganic film has arefraction index which is between a refraction index of thesemiconductor layer and a refraction index of an air.
 19. The moduleaccording to claim 1, further comprising a second transparent layerprovided on the transparent layer.
 20. The module according to claim 19,wherein the second transparent layer does not include the scatteringagent.
 21. The module according to claim 19, wherein the secondtransparent layer has a transparency with respect to the luminescentlight of the light emitting layer.
 22. The module according to claim 19,wherein the second transparent layer adheres to the phosphor layer. 23.The module according to claim 19, wherein the transparent layer is notprovided on the each light emitting chip.
 24. The module according toclaim 19, wherein the transparent layer is provided on the each lightemitting chip.
 25. The module according to claim 1, wherein a top faceof the transparent layer and the first face of the light emitting chipis formed at a same level to form a flat face.